Comet Calendar

UTD Cleanroom Seminar: Plasma Enhanced Atomic Layer Deposition (PEALD)

Monday, October 5, 2020 9am to 10am

Virtual Event

Dr. Peter J. King, Picosun Application Manager, will briefly introduce Picosun and Atomic Layer Deposition (ALD). We will then look at the impact of the R-200 ALD tool in international research, before conducting a walkaround and description of the tool UTD has recently acquired. We will finally cover tool maintenance and possible upgrades.

Session Abstract:

This talk will briefly introduce Picosun and Atomic Layer Deposition (ALD). We will then look at the impact of the R-200 ALD tool in international research, before conducting a walkaround and description of the tool UTD has recently acquired. We will finally cover tool maintenance and possible upgrades.

The talk sections will be:

1 Picosun in brief

2 The basics of ALD

3 R-200 Advanced tool – international contributions to ALD prior art

4 R-200 Advanced tool at UTD - walkaround and operation

5 Maintenance of the R-200 Advanced tool

Advance registration is required and will close 2 hours prior to the event start time on the event date.

Upon completing the Eventbrite form for each individual event date, registrants will receive a confirmation email immediately with links to add the webinar to an online calendar of choice. Instructions for HOW TO JOIN the online event, including the attendee link, will be emailed to registrants 2 hours prior to the event start time on the event date.

By registering for this event, you agree to be added to the UTD Office of Research monthly newsletter email list.

About our virtual platform:

This live event will be offered through Microsoft (MS) Teams. Attendees should be able to view the live stream video via any internet browser by copy/pasting the attendee link into the address bar; however, we do recommend installing the MS Teams app on your computer/smart device prior to the event for the best user experience.

Here is a list of helpful How-To's for MS Teams, including instructions for downloading and installing: https://utdallas.edu/oit/howto/microsoft-teams/. If you are affiliated with UT Dallas, you can also contact the UTD Help Desk via live chat, phone or email (contact info shown in the above-referenced How-To link).

Questions? Contact Tiffany.Willoughby@utdallas.edu.

Virtual Event

Office of Research and Innovation
Tiffany Willoughby
Email

UTD strives to create inclusive and accessible events in accordance with the Americans with Disabilities Act (ADA). If you require an accommodation to fully participate in this event, please contact the event coordinator (listed above) at least 10 business days prior to the event. If you have any additional questions, please email ADACoordinator@utdallas.edu and the AccessAbility Resource Center at accessability@utdallas.edu.

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